| 摘要 |
<p>PURPOSE:To prevent a positional deviation from generating in a cassette charging work by a method wherein a wafer cassette housing chamber is provided with a freely openable and closable charging opening and at the same time, is provided with a cassette stage, which protrudes from the charging opening to the outside of the housing chamber. CONSTITUTION:When a wafer cassette 14 is charted, a cap body 4 is first rotated centering around an axis 5 and after a charging opening 3 is opened, a cassette stage 16 is drawn out. Then, after the cassette 14 is placed on the stage 16, the stage is pushed in and the charging opening is shut by the cap body 4. Accordingly, as the stage 16 and an elevating device to make a cassette placing flange 9 ascend and descend are mechanically fixed, there is not transfer in the process of a charging work.</p> |
