发明名称 STRAHLENGANG-EINSTELLVORRICHTUNG
摘要 In an optical path adjusting system, an x-axis wedge prism and a y-axis wedge prism are disposed in opposition to each other on the incident optical path side of a condenser lens to which a laser beam is incident so that the x-axis wedge prism and the y-axis wedge prism are displaceable in the directions of x and y axes of a surface of a work respectivley. A position of irradiation of the laser beam on the condenser lens is detected by a detector and the detected position of irradiation is inputted to a controller. The controller supplies a driver with an error correction signal representing an error of the position of irradiation relative to a reference position. The x-axis wedge prism and the y-axis wedge prism are dispalced by the driver so that the laser beam is corrected to be parallel to an optical axis of the condenser lens.
申请公布号 DE3940694(A1) 申请公布日期 1990.06.13
申请号 DE19893940694 申请日期 1989.12.08
申请人 HITACHI, LTD., TOKIO/TOKYO, JP 发明人 SUZUKI, MINORU;MERA, KAZUO, HITACHI, JP
分类号 B23K26/00;B23K26/04;B23K26/06;B23K26/08;G02B26/08 主分类号 B23K26/00
代理机构 代理人
主权项
地址