发明名称 |
HIGH LIGHT-TRANSMISSIVE DUST-PROOF BODY AND METHOD OF PREPARING SAME |
摘要 |
A high light-transmissive dust-proof body (1) equipped with a holding frame (2) to be mounted in use on a mask substrate (5) and a transparent light-transmissive film (3) mounted on the holding frame (2), wherein the light-transmissive film (2) either comprises an inorganic film having a thickness of 0.2 mu m to less than 10 mu m and transmitting light having wavelengths of 240 to 500 nm at an average light transmittance of at least 85%, or forms (i) a three-layer structure of a low refractive index layer/high refractive index layer/base layer, or (ii) a five-layer structure comprising a low refractive index layer/high refractive index layer/base layer/high refractive index layer/low refractive index layer, the high refractive index layer being an inorganic layer and the low refractive index layer being an organic polymer layer. |
申请公布号 |
CA2005096(A1) |
申请公布日期 |
1990.06.13 |
申请号 |
CA19892005096 |
申请日期 |
1989.12.11 |
申请人 |
MITSUI PETROCHEMICAL INDUSTRIES, LTD. |
发明人 |
AGOU, TOKINORI;NAKAGAWA, HIROAKI |
分类号 |
G02B1/11;G03F1/62;(IPC1-7):G03F1/14;B01J13/00 |
主分类号 |
G02B1/11 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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