| 摘要 |
<p>PURPOSE:To satisfy reasonably a selective transfer function even by a single drive source by a method wherein engaging members are selectively interposed between a mechanism, which makes the rotating motion of an electric motor convert in a linear motion, and a plurality of supporting stand members. CONSTITUTION:In case a supporting stand member 13 of a first holder 12 is made to perform an ascending motion only in the holder 12 for transferring substrates only laminated in the holder 12 for first row use, a selective engaging member (an air cylinder) 51 only belonging to a first row is engaged with a rod 14 to correspond to the member 51. In this state, when an electric motor 60 is rotated in a prescribed direction by a prescribed amount, a carriage 54 is made to ascend through ball screw mechanisms 61 and 62. By this ascending motion, a tray 53 of the cylinder 51 is abutted on the lower end of the rod 14 to correspond to the tray 53. Contrary to this, remaining rods 14 are put in holes 55 opened in the carriage 54 with the ascention of the carriage 54 and their positions in their height directions are not changed. As a result, the member 13 only in the first row can be transferred to a prescribed distance in a prescribed height direction through the ascending motion of the rods 14.</p> |
