发明名称 |
SEMICONDUCTOR DEVICE INCLUDING A PROTECTIVE FILM |
摘要 |
This invention discloses a semiconductor device including a surface protective film obtained by forming an amorphous semiconductor film (16) on a semiconductor substrate (11). |
申请公布号 |
EP0348640(A3) |
申请公布日期 |
1990.06.13 |
申请号 |
EP19890108386 |
申请日期 |
1989.05.10 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
OSAWA, AKIHIKO C/O INTELLECTUAL PROPERTY DIVISION;KOSHINO, YUTAKA C/O INTELLECTUAL PROPERTY DIVISION;BABA, YOSHIRO C/O INTELLECTUAL PROPERTY DIVISION |
分类号 |
H01L21/768;H01L21/314;H01L23/29;H01L23/522;(IPC1-7):H01L23/28;H01L23/48 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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