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发明名称
MANUFACTURE OF PHOTOELECTRIC INTEGRATED CIRCUIT
摘要
申请公布号
JPH02153568(A)
申请公布日期
1990.06.13
申请号
JP19880308073
申请日期
1988.12.05
申请人
MITSUBISHI ELECTRIC CORP
发明人
MUROTANI TOSHIO
分类号
H01L27/15;H01S5/00;H01S5/026;H01S5/042
主分类号
H01L27/15
代理机构
代理人
主权项
地址
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