发明名称 PRODUCTION OF SUBSTRATE FOR THIN-FILM MAGNETIC HEAD
摘要 PURPOSE:To prevent polishing strains, scratches, etc., from remaining on the surface of an insulating film and to obtain the thin-film magnetic head having excellent magnetic characteristics by polishing a substrate by using a polisher in a suspension contg. >=1 kinds of powders selected from TiO2, Fe2O3 or V2O5. CONSTITUTION:The insulating film 2 consisting of Al2O3 or SiO2 is formed on the substrate 1 consisting of a sintered body. The substrate 1 on which the insulating film 2 is formed is put into the suspension contg. >=1 kinds of the powders selected from the TiO2, Fe2O3 or V2O5 and the surface of the insulating film 2 is polished in this suspension by using a polisher. The thin-film magnetic head having improved magnetic characteristics is obtd. if the magnetic film 3 is formed on the insulating film 2 subjected to surface polishing.
申请公布号 JPH02154309(A) 申请公布日期 1990.06.13
申请号 JP19880309370 申请日期 1988.12.07
申请人 TDK CORP 发明人 ITOU YOSHIAKI
分类号 G11B5/31;H01F10/30 主分类号 G11B5/31
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