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发明名称
AMMONIUMFLUORID ENTHALTENDE AETZLOESUNGEN.
摘要
申请公布号
DE278628(T1)
申请公布日期
1990.06.13
申请号
DE19880300653T
申请日期
1988.01.27
申请人
OLIN CORP., CHESHIRE, CONN., US
发明人
SCARDERA, MICHAEL, HAMDEN CONNECTICUT 06517, US;ROCHE, THOMAS STEPHEN, CHESHIRE CONNECTICUT 06410, US
分类号
C09K13/08;H01L21/311;(IPC1-7):C09K13/08;H01L21/31
主分类号
C09K13/08
代理机构
代理人
主权项
地址
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