| 摘要 |
PURPOSE:To improve exchange efficiency of gas in a main discharge space, and hence uniformize the shape of a laser beam and assure highly repetitive oscillation by providing a gas flow passage in a gap between a pre-ionization discharge electrode section and a main discharge electrode. CONSTITUTION:A discharge electrode structure of a discharge type gas laser includes a main discharge electrode 1, a space for excitation of necessary gas molecule, a pre-ionization electrode (auxiliary electrode) opposing to the main discharge electrode, and a space 1a on the side of the pre-ionization electrode. Arcing is performed around the auxiliary electrode 5, and ultraviolet rays emitted by the arching reach a main discharge space through the space 1a provided around the main discharge electrode 1 for pre-ionization of a gas molecule. Further, the gas molecule is excited by the discharge of the main discharge electrode 1 for lasing. Exchange of deteriorated gas by the discharge by fresh gas 10 can effectively be performed because the gas in the main discharge space flows 9 toward the pre-ionization discharge space 1a provided in the main discharge electrode. |
