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经营范围
发明名称
Vacuum apparatus
摘要
申请公布号
US4932357(A)
申请公布日期
1990.06.12
申请号
US19880181703
申请日期
1988.04.14
申请人
HITACHI, LTD.
发明人
TAMURA, NAOYUKI;KANAI, NORIO
分类号
B01J3/02;H01L21/00
主分类号
B01J3/02
代理机构
代理人
主权项
地址
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