MANUFACTURE OF MULTILAYER SEMICONDUCTOR DEVICE,申请号JP19880303474-传众专利搜索

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发明名称	MANUFACTURE OF MULTILAYER SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH02150048(A)	申请公布日期	1990.06.08
申请号	JP19880303474	申请日期	1988.11.30
申请人	YOKOGAWA ELECTRIC CORP	发明人	ARAKI SHOJIRO;ISHIGURO HIROSHI
分类号	H01L21/768;H01L29/78	主分类号	H01L21/768
代理机构		代理人
主权项
地址

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