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发明名称
MANUFACTURE OF SEMICONDUCTOR CRYSTAL
摘要
申请公布号
JPH02150018(A)
申请公布日期
1990.06.08
申请号
JP19880304510
申请日期
1988.11.30
申请人
FUJITSU LTD
发明人
EBE KOJI;NISHIJIMA YOSHITO;SAWADA AKIRA
分类号
H01L21/20;H01L21/203;H01L21/36
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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