| 摘要 |
PURPOSE:To obtain the AlN sintered body having higher heat conductivity than before by adding an additive contg. the acetylide compd. of an alkaline- earth metal and the oxide of a lanthanide metal to AlN powder, forming the mixture, and then sintering the formed product in a nonoxidizing atmosphere. CONSTITUTION:The following compds. are added as the additives to the AlN powder having high purity, preferably >=98% purity and <=10mum average particle diameter. Namely, 0.05-90wt.% of the acetylide of an alkaline-earth metal (e.g. CaC2 and SrC2) and 0.05-17wt.% of the oxide of a lanthanide metal (e.g. La2O3, CeO2, etc.) are mixed as the compds. The powder mixed with the additives is formed into a desired shape. The formed product is heated at 1500-2000 deg.C in a nonoxidizing atmosphere of gaseous N2, gaseous Ar, etc., and sintered. The AlN sintered body thus obtained has high density and excellent heat conductivity, and also has excellent thermal, electrical, mechanical, and further optical characteristics. |
