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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH02150026(A)
申请公布日期
1990.06.08
申请号
JP19880304406
申请日期
1988.12.01
申请人
SONY CORP
发明人
SATO JUNICHI
分类号
C23F4/00;H01L21/302;H01L21/3065;H01L21/3205;H01L21/3213
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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