CONTROL SYSTEM OF CLEAN ROOM,申请号JP19880303295-传众专利搜索

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发明名称	CONTROL SYSTEM OF CLEAN ROOM
摘要
申请公布号	JPH02150645(A)	申请公布日期	1990.06.08
申请号	JP19880303295	申请日期	1988.11.30
申请人	SHIMIZU CORP;YAMATAKE HONEYWELL CO LTD	发明人	FUTAKI KOICHI;KUDO MINEO;NARUSE AKIHIKO;HASEGAWA MASAHIRO;KAMIMURA KAZUYUKI;MIYASAKA FUSACHIKA
分类号	F24F7/007;F24F7/06;F24F11/02	主分类号	F24F7/007
代理机构		代理人
主权项
地址

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