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发明名称
METHOD FOR REMOVING SURFACE DEPOSIT IN BORON INFILTRATION
摘要
申请公布号
JPH02149660(A)
申请公布日期
1990.06.08
申请号
JP19880300831
申请日期
1988.11.30
申请人
TOSHIBA CORP
发明人
ARIMA ITSUO
分类号
B08B3/08;B08B3/10;C23C8/42
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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