| 摘要 |
PURPOSE:To provide a gas laser device characterized by excellent withstand voltage performance and stable discharging performance by providing an insulating part comprising polyimide resin between an auxiliary electrode and a dielectric. CONSTITUTION:An insulating part 30 comprising a polyimide resin film which is provided between an auxiliary electrode 5 and a dielectric 4 is provided. When the insulating part 30 comprising the polyimide resin film having excellent withstand voltage characteristic is provided between the auxiliary electrode 5 and the dielectric 4, the field strength between the auxiliary electrode 5 and a second main electrode 3 can be increased to 30-40 kV/mm which is 1.5-2 times the conventional value. As a result, a large quantity of preliminary discharge can be generated between the dielectric 4 and the second main electrode 3, and the discharge characteristic can be improved. This device can be applied to a gas laser device such as CO2 laser using a continuous wave power source. |
