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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH02148753(A)
申请公布日期
1990.06.07
申请号
JP19880301601
申请日期
1988.11.29
申请人
NEC CORP
发明人
SAKAIDA MASAHIKO;ITO SOICHI
分类号
H01L21/3205;H01L21/82;H01L21/822;H01L23/52;H01L27/04
主分类号
H01L21/3205
代理机构
代理人
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