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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02148845(A)
申请公布日期
1990.06.07
申请号
JP19880301067
申请日期
1988.11.30
申请人
HITACHI LTD
发明人
WASHIO KATSUYOSHI;NAKAMURA TORU
分类号
H01L29/73;H01L21/3205;H01L21/321;H01L21/331;H01L21/336;H01L21/60;H01L21/82;H01L23/52;H01L29/78
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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