| 摘要 |
PURPOSE:To transfer quickly by providing an overflow coating liquid tank, a feeding tank, a coating liquid feeding pipeline and a coating liquid circulating line. CONSTITUTION:Coating liquid is transferred from a feeding tank 4 through a liquid feeding pipeline in a manner that photo sensitive liquid overflows all the time from the end surface of a coating liquid tank 1 to the side of a recovery tank 12. Then, a drum 3 is inserted into the coating liquid tank 1 and immersed. When the drum 3 is lifted up, coating is completed, and a following drum 3 is immersed. The overflowing coating liquid is so transferred as not to include foams through an overflow piping 8 and returns to the feeding tank 4. The photo sensitive liquid, therefore, circulates in a coating device system without including foams, and a good sensitizing treatment is provided all the time. |
