| 摘要 |
PURPOSE:To prevent dusts from being sucked, and to improve the quantity, yield and productivity of a material to be processed by providing an ion generator for ionizing laminar flow gas in a vertical laminar flow passage. CONSTITUTION:A prefilter 17 for filtering a vertical laminar flow 14, fans 18, 18 for forcibly intaking the flow 14, a damper 19 for buffering the flow 14, and an ion generator 20 for ionizing the buffered flow 14 are sequentially disposed in this order in a rectangular cylindrical housing 16 of a temperature/ moisture controller 15. Since the flow 14 to be fed into a cup 2 can be ionized by the generator 20 provided in the controller 15, static electricity charged on a semiconductor wafer 7 can be neutralized, thereby preventing fine dusts, etc., from being sucked to the surface. |
