Negative-working, radiation-sensitive mixture containing a polymer containing 1,2,3-thiadiazole groups, and recording material containing this mixture

摘要

The invention relates to a negative-working, radiation-sensitive mixture containing a binder and a polymer containing 1,2,3-thiadiazole groups. The binder employed is a polyfunctional compound whose functional groups react with ketene; the polymer is a compound formed by polymerisation of a compound of the formula I <IMAGE> in which R is a polymerisable group. If the polymer is a copolymer in which the comonomer is a compound containing functional groups which can react with ketene, the binder can be omitted. The negative-working, radiation-sensitive mixture described is particularly suitable for UV, electron-beam and X-ray lithography.