APPARATUS FOR INSPECTING SEMICONDUCTOR,申请号JP19880302699-传众专利搜索

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发明名称	APPARATUS FOR INSPECTING SEMICONDUCTOR
摘要
申请公布号	JPH02147974(A)	申请公布日期	1990.06.06
申请号	JP19880302699	申请日期	1988.11.30
申请人	TOKYO ELECTRON LTD	发明人	KITAMURA YOSHISUKE
分类号	G01R31/26;H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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