LASER BEAM TRIMMING METHOD FOR ELECTRONIC PART

摘要

PURPOSE:To shorten the time required for laser beam trimming by repeating alternately a first step to irradiate and scan a laser beam from a laser beam trimming device and a second step to stop the irradiation of the laser beam to carry out laser beam trimming. CONSTITUTION:A changeable distance data signal is outputted to a laser beam controller 4 of the laser beam trimming device 6 from a measuring instrument 14 as the first step. The controller 4 irradiates and scans the laser beam extending over the prescribed length with respect to the resistance part of an electronic part 8 from a laser beam source 2 in response to input of the distance data signal. The irradiation of the laser beam with respect to the resistance part of the electronic part 8 from the trimming device 6 is then stopped until the change of an output characteristic of the electronic part 8 is finished as a result of measurement of the output characteristic of the electronic part 8 by the measuring instrument 14 as the second step. Laser beam trimming is carried out on the resistance part of the electronic part 8 by repeating alternately both steps in this way.