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发明名称
METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
摘要
申请公布号
EP0142252(B1)
申请公布日期
1990.06.06
申请号
EP19840306441
申请日期
1984.09.20
申请人
FUJITSU LIMITED
发明人
OSHIKAWA, YOSHIHIRO
分类号
H01L27/10;H01L21/265;H01L21/334;H01L21/8242;H01L21/8247;H01L27/00;H01L27/108;H01L27/115;H01L29/78;H01L29/788;H01L29/792;H01L29/92
主分类号
H01L27/10
代理机构
代理人
主权项
地址
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