发明名称 REFLECTION MEASUREMENT FOR LIMITED FINE POINT PART
摘要 <p>PURPOSE:To enable a higher measuring accuracy with a simplified construction and an easier handling by forming an edge-shaped opening to provided a conical inclined surface with which infrared rays reflected on a limited fine point part of a sample are detected. CONSTITUTION:Infrared rays 2 cast into a direction of the arrow A from an interferometer to form an image of a light source on a sample 1. This has a diameter larger than an opening of a mask 10. Then, infrared rays irradiating the sample 1 are reflected on the sample and detected and measured with a detector via a reflecting mirror 11. Here, the opening of the mask 10 is formed into an edge-shaped cross-section and a conical inclined surface 10B is provided to detect infrared rays 2 reflected at a limited fine point part 1A of the sample 1. Then, infrared rays 2 reflected on the inclined surface 10B are absorbed mostly by the perimeter none turning in the direction of the arrow B. Thus, the part 1A to be measured of the sample 1 is made to match the opening of the mask 10: it enables an effective infrared spectral analysis.</p>
申请公布号 JPH02145943(A) 申请公布日期 1990.06.05
申请号 JP19880300038 申请日期 1988.11.28
申请人 FUJI ELECTRIC CO LTD 发明人 WATANABE ATSUO
分类号 G01N21/55;G01N21/35;G01N21/3563 主分类号 G01N21/55
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