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经营范围
发明名称
Method of controlling floating zone
摘要
申请公布号
US4931945(A)
申请公布日期
1990.06.05
申请号
US19880280695
申请日期
1988.12.05
申请人
SHIN-ETSU HANDOTAI COMPANY LIMITED
发明人
TAGUCHI, KENICHI;WATANABE, MASATAKA
分类号
H01L21/18;C30B13/28;C30B13/30;H01L21/208
主分类号
H01L21/18
代理机构
代理人
主权项
地址
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