| 摘要 |
PURPOSE:To enable rapid heating and cooling of local areas in a phase-shift type optical recording film, and to improve the erasing rate and record retaining property by sandwiching the recording film with heat-insulating films which are formed in a manner that the elements of the compounds constituting the recording film are gradedly change in the oxides into the heat-insulating films. CONSTITUTION:The heat-insulating film 5 comprising antimony oxide and indium oxide is formed on a substrate 1 with tracks 2 by sputtering on indium-antimony alloy as a target with supplying carrier gas containing large amount of oxygen. Then the amount of oxygen is reduced while the amount of indium antimony in the film 5 is raised to form the phase-shift type optical recording film 3 comprising indium antimony. Then the amount of oxygen gas is raised again to form the heat insulating film 5. The recording film thus formed between the heat-insulating films can be locally, rapidly heated or cooled by laser irradiation, which improves the erasing rate and record retaining property. |
