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发明名称
SAMPLE COOLING TYPE ION BEAM THIN FILM MANUFACTURING DEVICE
摘要
申请公布号
JPH02144843(A)
申请公布日期
1990.06.04
申请号
JP19880299351
申请日期
1988.11.25
申请人
OYO GIJUTSU KENKYUSHO:KK
发明人
NAGAHAMA YORIAKI
分类号
H01J37/317
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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