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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH02144919(A)
申请公布日期
1990.06.04
申请号
JP19880298109
申请日期
1988.11.28
申请人
HITACHI LTD
发明人
IKEDA TAKAHIDE;SAITO OSAMU;MAEHARA MASAAKI;TANBA NOBUO
分类号
H01L21/3205
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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