| 摘要 |
PURPOSE:To form an optical recording medium having desirable characteristics without increasing its forming time and cost by opening a vessel for sealing a target material in an inert gas atmosphere, and conveying it into a vacuum film forming chamber without exposing it with oxygen and moisture. CONSTITUTION:A target material vacuum-sealed in a vessel in an argon substituted atmosphere is opened in a glove box in the argon atmosphere, conveyed in the gas of the argon atmosphere, cleaned in an atmosphere regulating cleaning tank 2, and returned to a glove box 1 of the argon atmosphere. A backing plate, a bonding agent, a target are stacked in the box 1, conveyed into an atmosphere regulating boding furnace 3 of the argon atmosphere, bonded, then returned to the box 1, and conveyed to a continuous film forming machine 4. The box 1 is connected after a film formation preparation chamber is filled with the argon atmosphere, and a target securing work is conducted in the argon atmosphere. |
