摘要 |
PURPOSE:To prolong the life of the reticule by constituting the reticule of a transparent substrate and metallic films and acid resistant metal oxide film which are successively formed on this transparent substrate. CONSTITUTION:The reticule is constituted of the transparent substrate 1 and the metallic films 2, 3 and the acid resistant metal oxide film 4 which are successively formed on the transparent substrate 1. Since the surface of the patterns is coated with the acid resistant film 4, the reticule is hardly etched even if the reticule is cleaned by a hot sulfuric acid, etc. The reticule is able to withstand long-term cleaning and use and the life of the reticule is prolonged. |