发明名称 RETICULE FOR EXPOSING
摘要 PURPOSE:To prolong the life of the reticule by constituting the reticule of a transparent substrate and metallic films and acid resistant metal oxide film which are successively formed on this transparent substrate. CONSTITUTION:The reticule is constituted of the transparent substrate 1 and the metallic films 2, 3 and the acid resistant metal oxide film 4 which are successively formed on the transparent substrate 1. Since the surface of the patterns is coated with the acid resistant film 4, the reticule is hardly etched even if the reticule is cleaned by a hot sulfuric acid, etc. The reticule is able to withstand long-term cleaning and use and the life of the reticule is prolonged.
申请公布号 JPH02144536(A) 申请公布日期 1990.06.04
申请号 JP19880298556 申请日期 1988.11.25
申请人 NEC CORP 发明人 IGARASHI TADANAO
分类号 G03F1/48;G03F1/54;H01L21/027 主分类号 G03F1/48
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