| 摘要 |
PURPOSE:To obtain the subject diamond particle with a large size in a high yield by depositing the diamond on a base plate having the surface of a recessed shape parallel in the longitudinal direction of a filament. CONSTITUTION:A base plate 5 made of a metal with a high melting point and having the surface of a recessed shape parallel in the longitudinal direction of a filament is placed in a reaction tank 1 made of a metal. The filament 4 is then electrically charged for heating and the raw gas is simultaneously introduced from a gas-charge opening 2 to be excited. Among gas flows containing radical ions released from the filament 4, the gas flow released downwards is bent by a gas flow generated from a part of the base plate 5 directly under the filament 4 where is especially at high temperatures and forced to be blown on the base plate 5, thus forming the objective diamond particle with 100-200mum diameter on the side surface of the base plate 5. |
