发明名称 EXCIMER LASER APPARATUS
摘要 PURPOSE:To prevent the surface of a capacitor from being corroded by a method wherein the capacitor is housed airtightly inside a container constituted by using an insulating material which is corrosion-resistant to a laser medium. CONSTITUTION:A container 1 is formed so as to airtightly house capacitors 3 arranged in a row at the upper and lower sides of a conductor 9 and is composed of a corrosion-resistant insulating material such as a fluorine resin, a ceramic or the like which can be divided into two parts. In this container 1, O-rings 2a composed of a fluorine rubber are fitted into packaging grooves formed in separation faces; O-rings 2b of the fluorine rubber are fitted into circular packing grooves formed so as to surround electrode-extension rods 4 of the discrete capacitors; accordingly, the capacitors 3 can be housed airtightly into the container. Thereby, it is possible to prevent the surface of the capacitors from being corded by a halogen element; it is possible to reduce an impurity generated inside a laser chamber to a minimum ; a laser medium can be made long-lived.
申请公布号 JPH02144978(A) 申请公布日期 1990.06.04
申请号 JP19880299052 申请日期 1988.11.26
申请人 FUJI ELECTRIC CO LTD 发明人 NUMATA SHINOBU
分类号 H01S3/03;H01S3/097;H01S3/0971 主分类号 H01S3/03
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