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发明名称
SCAN REFLECTION ELECTRON MICROSCOPE
摘要
申请公布号
JPH02144838(A)
申请公布日期
1990.06.04
申请号
JP19880298354
申请日期
1988.11.28
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
INOUE NAOHISA;YAMADA KOJI
分类号
H01J37/248;H01J37/147
主分类号
H01J37/248
代理机构
代理人
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地址
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