| 摘要 |
PURPOSE:To form an information recording medium having excellent environmental resistance by providing alloy of Te and group IB element on a support, and providing a recording layer formed by sputtering in specific ratio mixture gas of rare gas and hydrocarbon. CONSTITUTION:After the air in a vessel is evacuated to 0.2Torr by a rotary pump 18, it is evacuated to 1X10<-5>Torr by a cryopump 19. Then, argon gas is introduced by an argon gas line 20 and CH4 is introduced by a gas line 21 so that the mixture ratio Q of CH4 becomes 5% <= Q <= 50%, and the vessel is held at a predetermined pressure. Power is applied to a sputter source 24 for a predetermined period of time while rotating a board 12 thereby to form a recording layer 13 on the board 12, and to further laminate an organic holding layer 14 made of ultraviolet ray curable resin, etc. to obtain an information recording medium. |
