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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02144938(A)
申请公布日期
1990.06.04
申请号
JP19880298127
申请日期
1988.11.28
申请人
HITACHI LTD;HITACHI VLSI ENG CORP
发明人
OKINAGA TAKAYUKI;OTSUKA KANJI;AKASAKI HIROSHI;EMATA KOJI;KIKUCHI NORISHIGE
分类号
H01L23/522;H01L21/768
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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