发明名称 RADIOSENSITIVE MIXTURE AND RADIOSENSITIVE COPYING MATERIAL PREPARED THEREFROM
摘要 PURPOSE: To attain satisfactory image contrast at exposure even when a buffer is contained in a mixture by using specified spiroindolinobenzopyrane as a dye. CONSTITUTION: This mixture contains 1,2-quinonediazide, a polymer binder insoluble in water but soluble in an aq. alkaline soln. and spiroindolinobenzopyrane represented by formula I as a dye. In the formula I, R is H, 1-16C alkyl, each of R1 -R4 is H, halogen, 1-4C alkyl, etc., and each of R5 -R6 is H, halogen, nitro, etc. Satisfactory contrast is attained at exposure.
申请公布号 JPH02144538(A) 申请公布日期 1990.06.04
申请号 JP19890262843 申请日期 1989.10.07
申请人 HOECHST AG 发明人 ANDOREASU ERUZETSUSAA;OTOFURIITO GASHIYURAA;DEIITAA MOORU
分类号 G03F7/004;G03F7/022;G03F7/105;H01L21/027 主分类号 G03F7/004
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