SEMICONDUCTOR DEVICE AND ITS MANUFACTURE,申请号JP19880298323-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号	JPH02144968(A)	申请公布日期	1990.06.04
申请号	JP19880298323	申请日期	1988.11.28
申请人	HITACHI LTD;HITACHI DEVICE ENG CO LTD	发明人	KATO MASATAKA;OKABE TAKEAKI;NOZU CHIAKI;WATANABE KIKUO
分类号	H01L21/76;H01L29/78	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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