| 摘要 |
PURPOSE:To lengthen an optical path of an incident or a reflected light which travels through a laminar photoelectric conversion section and to realize a photoelectric conversion element structure which is free or restrained from deteriorating in an electric property by a method wherein a light transmissive layer whose surface is rugged is laminated on the surface of a laminar photoelectric conversion section through the intermediary of a light transmissive protective layer. CONSTITUTION:Provided that an exposed face side of a second semiconductor layer 12 out of the upside and the underside of a laminar photoelectric conversion section 10 is a light incident plane, a protective layer 30 is formed on the light incident plane, and furthermore a surface rugged layer 40, whose surface is a properly coarse or a rugged plane provided with pyramidal and waved irregularities, is formed thereon. The protective layer 30 and the surface rugged layer 40 both are formed of a light transmissive material, the protective layer 30 serves to make the surface of the second semiconductor layer 12 stable in an electrical property or to hold down a carrier recombination speed to a small value so as to prevent a photoelectric conversion efficiency from deteriorating, by this setup, a photoelectric conversion element of this design is decreased in surface reflectivity to an incident light and remarkably improved relatively in a short wavelength region less than 900nm. |
