| 摘要 |
<p>PURPOSE: To attain an optimum gas discharge strength and uniformity by providing a gas introducing device in the region between a main body and a deformable cover, dividing the cover into various deformable parts and furnishing a gas passage through-hole in the highly deformed part. CONSTITUTION: At least partially deformable cover 18 is fixed to a main body 10, and at least one gas introducing device 16 is provided in the region 26 between the main body 10 and the cover 18. The cover 18 is divided into various deformable parts 18', 18" and 24, and a gas passage through-hole is furnished at least in the highly deformed parts 18' and 18". Consequently, optimum gas discharge strength and uniformity are attained in the section of the gas permeable membrane having the maximum angle of curvature.</p> |
