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发明名称
WASHING DEVICE
摘要
申请公布号
JPH02144182(A)
申请公布日期
1990.06.01
申请号
JP19880294570
申请日期
1988.11.24
申请人
HITACHI LTD
发明人
FUJIKURA SEIJI
分类号
B08B11/02;H01L21/304
主分类号
B08B11/02
代理机构
代理人
主权项
地址
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