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发明名称
TAPER ETCHING METHOD FOR AL OR AL ALLOY FILM
摘要
申请公布号
JPH02143425(A)
申请公布日期
1990.06.01
申请号
JP19880297962
申请日期
1988.11.24
申请人
SONY CORP
发明人
SHINOHARA KEIJI
分类号
C23F4/00;H01L21/302;H01L21/3065;H01L21/3205
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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