TELECENTRIC SUB-FIELD DEFLECTION WITH A VARIABLE AXIS IMMERSION LENS,申请号EP19880480086-传众专利搜索

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发明名称	TELECENTRIC SUB-FIELD DEFLECTION WITH A VARIABLE AXIS IMMERSION LENS
摘要
申请公布号	EP0331859(A3)	申请公布日期	1990.05.30
申请号	EP19880480086	申请日期	1988.12.06
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	GROVES, TIMOTHY ROBINSON;PFEIFFER, HANS CHRISTIAN;STICKEL, WERNER;STURANS, MARIS ANDRIS
分类号	H01J37/04;H01J37/141;H01J37/147;H01J37/305;H01L21/027;(IPC1-7):H01J37/147;H01J37/317	主分类号	H01J37/04
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