CONTINUATION TYPE VAPOR GROWTH DEVICE,申请号JP19880294406-传众专利搜索

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发明名称	CONTINUATION TYPE VAPOR GROWTH DEVICE
摘要
申请公布号	JPH02140918(A)	申请公布日期	1990.05.30
申请号	JP19880294406	申请日期	1988.11.21
申请人	TOSHIBA MACH CO LTD	发明人	KOMIYAMA KICHIZO
分类号	C30B25/02;H01L21/205;H01L21/31	主分类号	C30B25/02
代理机构		代理人
主权项
地址

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