| 摘要 |
<p>PURPOSE:To transfer a wafer, etc., to a desired array, and to shorten a time required for the transfer by providing selecting means for selectively reciprocating only a plurality of platelike member supporting means of parts of the plurality of platelike member supporting means. CONSTITUTION:A plurality of platelike member 2 supporting means for removing the wafer 2 of a first platelike member placing unit 1, forwarding it to a holding means 11 side while supporting it and returning, after holding, it to an original position are provided. Selecting means for selectively forwarding and returning only a plurality of platelike member 2 supporting means of parts of the plurality of the platelike member supporting means 4A, 4B such as electromagnetic solenoids 6 are provided. The wafer 2 can be efficiently transferred effectively to a desired array pattern by minimum number of transfers. Further, the selection by the solenoid 6 is rapidly conducted for a plurality of wafers by a controlled electric signal. Thus, a time required for the transfer can be shortened.</p> |
