| 摘要 |
PURPOSE:To correctly and easily adjust and fix the crystal pulling-up wire in the growing of crystal by Czochrtalski method when the crystal production equipment is assembled by irradiating the pulling-up wire with a light from two directions and constituting the device so as to arithmetically treat the output value sent from the photodetector in which the light strength of the irradiating light is photoelectrically converted. CONSTITUTION:At the specified height of the pulling-up wire which passes through in a through-hole 30 and pulls up the crystal grown by Czochralski method, the following are provided: light sources 48, 56 which irradiate the crystal pulling-up wire side with light, the photodetectors 46, 54 which are disposed confronting with the light sources 48, 56 through the crystal pulling-up wire to photoelectrically convert the intensity of the light from the light sources 48, 56, the slits 36, 38 which are disposed between the photodetectors 46, 54 and the crystal pulling-up wire side to allow a part of light flux to proceed to the photodetectors 46, 54 from the light sources 48, 56 to pass through, the eccentricity measuring means 66 measuring the eccentricity from the preferable position of the crystal pulling-up wire based on the output values of the detectors 46, 54, and the display means displaying the eccentricity. |
