SAMPLE MOVING DEVICE, SAMPLE MOVING SYSTEM AND SEMICONDUCTOR MANUFACTURING DEVICE

摘要

PURPOSE:To improve the positioning accuracy of a sample by equipping a fine moving actuator provided on a base, a fine moving stage driven thereby, a rough movement driving mechanism installed thereon, a rough movement stage driven thereby and a holding means adsorbing a sample base. CONSTITUTION:A rough movement stage 2 driven by an actuator 223 for driving the rough movement stage and a fine movement stage 3 driven by the actuator 319 for driving the fine movement stage are mounted on a base 1 together drivably independently respectively. The position of a movable carrier 4 adsorbed with a wafer 5 is directly measured by a measuring machine 8. In case of largely moving the movable carriage 4 suction and release are alternately repeated between the stage 2 and 3. At the step moving time it is moved by being sucked to the stage 2 and at the fine movement time for positioning moved by being sucked to the stage 2. Consequently the movement of the stages 2 and 3 can independently be performed without any mutual interference and the positioning error of the wafer 5 is only by the effect of the control error of the stage 3.