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发明名称
摘要
申请公布号
JPH0270430(U)
申请公布日期
1990.05.29
申请号
JP19880149465U
申请日期
1988.11.16
申请人
发明人
分类号
H01L21/8249;H01L21/265;H01L21/266;H01L27/06;(IPC1-7):H01L21/266
主分类号
H01L21/8249
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