发明名称 INSPECTION APPARATUS INCLUDING PHOTODETECTION AND SCANNING APPARATUS
摘要 <p>An inspection apparatus for inspecting, for example, sheet material, in which a beam of radiation 12 is scanned across a sheet 13 by means of a first facet 41 of a rotating mirror drum 22. Scattered radiation from the sheet is received by a second facet 46 and 2 is passed to a photodetector 49 for analysis.</p>
申请公布号 CA1269739(A) 申请公布日期 1990.05.29
申请号 CA19870535822 申请日期 1987.04.28
申请人 SIRA LIMITED 发明人 WEST, ROBERT N.
分类号 G01M11/00;G01N21/89;G01N21/892;(IPC1-7):G01N21/89 主分类号 G01M11/00
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